Wide Field-of-View Reflection-Mode Ptychographic Imaging Microscope with Tabletop 12.7 nm High Harmonic Illumination

Tabletop nanometer extreme ultraviolet imaging in an extended reflection mode using coherent Fresnel ptychography

We demonstrate the first (to our knowledge) general purpose full-field reflection-mode extreme ultraviolet (EUV) microscope based on coherent diffractive imaging. This microscope is capable of nanoscale amplitude and phase imaging of extended surfaces at an arbitrary angle of incidence in a noncontact, nondestructive manner. We use coherent light at 29.5 nm from high-harmonic upconversion to il...

Nanoscale EUV Microscopy on a Tabletop: A General Transmission and Reflection Mode Microscope Based on Coherent Diffractive Imaging with High Harmonic Illumination

Coherent Ptychographic Imaging Microscope With 17.5nm Spatial Resolution Employing 13.5nm High Harmonic Light

High-resolution imaging is an essential tool for understanding nanoscale systems. In particular, tabletop extreme ultraviolet (EUV) coherent diffractive imaging (CDI) techniques based on high harmonic generation (HHG) are ideal for investigating complex nanostructured systems, including their static and dynamic electronic, phononic and magnetic properties. Tabletop EUV CDI combines elemental an...

High contrast 3D imaging of surfaces near the wavelength limit using tabletop EUV ptychography.

Scanning electron microscopy and atomic force microscopy are well-established techniques for imaging surfaces with nanometer resolution. Here we demonstrate a complementary and powerful approach based on tabletop extreme-ultraviolet ptychography that enables quantitative full field imaging with higher contrast than other techniques, and with compositional and topographical information. Using a ...

2 3 M ar 2 01 6 Wide - field Fourier ptychographic microscopy using laser illumination source

Fourier ptychographic (FP) microscope is a coherent imaging method that can synthesize an image with a higher bandwidth using multiple low-bandwidth images captured at different spatial frequency regions. The method’s demand for multiple images drives the need for a brighter illumination scheme and a high-frame-rate camera for a faster acquisition. We report the use of a guided laser beam as an...